метод пересекающихся факелов(статья Epitaxial growth of copper oxide films by reactive cross-beam pulsed-laser deposition: For particulate elimination, an interesting approach is the so-called ‘‘crossed laser-induced plasma plumes'' based on the use of two identical targets irradiated by two laser beams, leading to a plasma-induced expansion free from particulates towards the substrates.doi.orgJitel.Servera)
